JPS6135747Y2 - - Google Patents
Info
- Publication number
- JPS6135747Y2 JPS6135747Y2 JP1981113602U JP11360281U JPS6135747Y2 JP S6135747 Y2 JPS6135747 Y2 JP S6135747Y2 JP 1981113602 U JP1981113602 U JP 1981113602U JP 11360281 U JP11360281 U JP 11360281U JP S6135747 Y2 JPS6135747 Y2 JP S6135747Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- metal plate
- piezoelectric
- pump
- pump chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 19
- 239000003566 sealing material Substances 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 6
- 239000012530 fluid Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981113602U JPS5818083U (ja) | 1981-07-30 | 1981-07-30 | 圧電振動子ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981113602U JPS5818083U (ja) | 1981-07-30 | 1981-07-30 | 圧電振動子ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5818083U JPS5818083U (ja) | 1983-02-03 |
| JPS6135747Y2 true JPS6135747Y2 (en]) | 1986-10-17 |
Family
ID=29907898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981113602U Granted JPS5818083U (ja) | 1981-07-30 | 1981-07-30 | 圧電振動子ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5818083U (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6017279A (ja) * | 1983-07-11 | 1985-01-29 | Tamagawa Seiki Kk | 電歪振動子を用いる気体ポンプ |
| JP2772525B2 (ja) * | 1988-07-27 | 1998-07-02 | 株式会社日本計器製作所 | 圧電ポンプ |
| JP5113115B2 (ja) * | 2009-04-15 | 2013-01-09 | 特許機器株式会社 | 圧電型加速度センサ |
-
1981
- 1981-07-30 JP JP1981113602U patent/JPS5818083U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5818083U (ja) | 1983-02-03 |
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